ED8-6-INV

Direct-write Printing of Josephson Devices in an Electron Microscope
*Kaveh Lahabi1, Julian Linek2, Timothy van den Berg1, Remko Fermin1, Dieter Kölle2, Reinhold Kleiner2, Tünde de Vries1, Nick Groen1, Jan Aarts1

Josephson devices are the essential building blocks of superconducting electronics. Usually, fabricating a Josephson device is a resource-intensive and multi-step procedure, relying on thin-film deposition and lithography. Moreover, such practices are incompatible with many applications (e.g., non-planar objects and fragile structures). Here, we introduce a fully-additive direct-write approach based on electron beam-induced deposition (EBID), where a conventional scanning electron microscope can print complete Josephson devices in a matter of minutes.

In this talk, I demonstrate that – by tuning the scanning parameter of a focused electron beam – we can print both superconducting (S) and the normal-metal (N) components based on a single material: tungsten carbide. I describe how we utilized this feature to develop printable SNS (proximity) Josephson junctions and SQUIDs with tunable transport characteristics and present an outlook for their applications.

References. [1] T. J. Blom et. al, ACS Nano, 2021, 15, 1, 322–329.

Figure Caption. Left: False colored scanning electron microscope image of a Josephson junction, printed using EBID, and its superconducting transition. Right: Shapiro response of the junction as a function of voltage and external microwave power. The Shapiro steps appear as conductance peaks at quantized voltages

Keywords: Superconducting Devices, Josephson Junction, SQUID, Direct-write Fabrication

fig